Image sensor including a transparent conductive layer in a trench

ABSTRACT

An image sensor is disclosed. The image sensor includes a substrate including an active region and a dummy region, a plurality of unit pixels on the active region, a transparent conductive layer on a first surface of the substrate, a light-blocking layer on the transparent conductive layer and electrically connected to the transparent conductive layer, the light-blocking layer having a grid structure adjacent light transmission regions, and a pad electrically connected to the light-blocking layer, on the dummy region.

CROSS-REFERENCE TO RELATED APPLICATIONS

The present U.S. non-provisional patent application is a continuation ofU.S. patent application Ser. No. 16/392,916, filed Apr. 24, 2019, whichitself claims priority under 35 U.S.C. § 119 to Korean PatentApplication No. 10-2018-0101918, filed on Aug. 29, 2018, in the KoreanIntellectual Property Office, the entire contents of both of which arehereby incorporated by reference in their entireties.

BACKGROUND

The present disclosure relates to an image sensor, and in particular, toa complementary metal-oxide-semiconductor (CMOS) image sensor.

An image sensor is an electronic device that converts optical imagesinto electrical signals. With the recent development of the computer andcommunications industries, there is an increased demand for highperformance image sensors in a variety of applications such as digitalcameras, camcorders, personal communication systems, gaming machines,security cameras, micro-cameras for medical applications, and/or robots.

The image sensors may be generally classified into charge-coupled-device(CCD) and/or complementary metal-oxide-semiconductor (CMOS) imagesensors. Since the CMOS image sensors have a simple operation method andcan be provided in the form of a single chip, in which signal processingcircuits are integrated, it is possible to reduce a size of a producttherewith. In addition, since CMOS image sensors require a relativelylow consumption power, CMOS image sensors may be used in an electronicdevice with a limited battery capacity. Furthermore, CMOS image sensorsmay be fabricated using CMOS fabrication techniques, and thus, it may bepossible to reduce a manufacturing cost thereof. Moreover, the CMOSimage sensor may provide high resolution images. Accordingly, the use ofCMOS image sensors is rapidly increasing.

SUMMARY

Some embodiments of the inventive concept provide an image sensor withan improved dark current property.

According to some embodiments of the inventive concept, an image sensormay include a substrate including an active region and a dummy region, aplurality of unit pixels on the active region, a transparent conductivelayer on a first surface of the substrate, a light-blocking layer on thetransparent conductive layer and electrically connected to thetransparent conductive layer, the light-blocking layer having a gridstructure adjacent light transmission regions, and a pad electricallyconnected to the light-blocking layer, on the dummy region.

According to some embodiments of the inventive concept, an image sensormay include a substrate including a first surface and a second surfaceopposite to the first surface, a first device isolation pattern on thefirst surface, the first device isolation pattern in a trench adjacent aplurality of unit pixels in the substrate, and a transparent conductivelayer on the first device isolation pattern. A depth of the trench maybe less than a thickness of the substrate.

According to some embodiments of the inventive concept, an image sensormay include a substrate including a first surface and a second surfaceopposite to the first surface, a trench defining a plurality of unitpixels in the substrate, and a transparent conductive layer on the firstsurface of the substrate. The transparent conductive layer may include avertical portion in the trench, and a width of the vertical portionadjacent to the first surface may be greater than a width of thevertical portion adjacent to the second surface.

BRIEF DESCRIPTION OF THE DRAWINGS

Example embodiments will be more clearly understood from the followingbrief description taken in conjunction with the accompanying drawings.The accompanying drawings represent non-limiting, example embodiments asdescribed herein.

FIG. 1 is a block diagram illustrating an image sensor according toexample embodiments of the inventive concept.

FIG. 2 is a circuit diagram of an active pixel sensor array of an imagesensor according to example embodiments of the inventive concept.

FIG. 3 is a plan view illustrating an image sensor according to exampleembodiments of the inventive concept.

FIGS. 4A, 4B, and 4C are sectional views taken along lines I-I′, II-II′,and III-III′, respectively, of FIG. 3.

FIGS. 5 to 7 are sectional views, which are taken along line I-I′ ofFIG. 3 and illustrate a method of fabricating an image sensor accordingto example embodiments of the inventive concept.

FIGS. 8A, 8B and FIG. 8C are sectional views, which are taken alonglines I-I′, II-II′, and III-III′, respectively, of FIG. 3 and illustratean image sensor according to example embodiments of the inventiveconcept.

FIG. 9 is a plan view illustrating an image sensor according to exampleembodiments of the inventive concept.

FIGS. 10A, 10B, and 10C are sectional views taken along lines I-I′,II-II′, and III-III′, respectively, of FIG. 9.

FIGS. 11, 12, 13, and 14A are sectional views, which are taken alongline I-I′ of FIG. 9 and illustrate a method of fabricating an imagesensor according to example embodiments of the inventive concept.

FIG. 14B is a sectional view taken along line III-IIII′ of FIG. 9,according to example embodiments of the inventive concept.

FIGS. 15A and 15B are sectional views, which are taken along lines I-I′and III-III′, respectively, of FIG. 9 and illustrate an image sensoraccording to example embodiments of the inventive concept.

It should be noted that these figures are intended to illustrate thegeneral characteristics of methods, structure and/or materials utilizedin certain example embodiments and to supplement the written descriptionprovided below. These drawings are not, however, to scale and may notprecisely reflect the precise structural or performance characteristicsof any given embodiment, and should not be interpreted as defining orlimiting the range of values or properties encompassed by exampleembodiments. For example, the relative thicknesses and positioning ofmolecules, layers, regions and/or structural elements may be reduced orexaggerated for clarity. The use of similar or identical referencenumbers in the various drawings is intended to indicate the presence ofa similar or identical element or feature.

DETAILED DESCRIPTION

It is noted that aspects of the inventive concept described with respectto one embodiment, may be incorporated in a different embodimentalthough not specifically described relative thereto. That is, allembodiments and/or features of any embodiment can be combined in any wayand/or combination. These and other objects and/or aspects of thepresent inventive concept are explained in detail in the specificationset forth below. As used herein, the term “and/or” includes any and allcombinations of one or more of the associated listed items. Expressionssuch as “at least one of,” when preceding a list of elements, modify theentire list of elements and do not modify the individual elements of thelist. Example embodiments of the inventive concepts will now bedescribed more fully with reference to the accompanying drawings, inwhich example embodiments are shown.

FIG. 1 is a block diagram illustrating an image sensor according toexample embodiments of the inventive concept.

Referring to FIG. 1, an image sensor may include an active pixel sensorarray 1, a row decoder 2, a row driver 3, a column decoder 4, a timinggenerator 5, a correlated double sampler (CDS) 6, an analog-to-digitalconverter (ADC) 7, and an I/O buffer 8.

The active pixel sensor array 1 may include a plurality of unit pixels,which are two-dimensionally arranged, and may be used to convert opticalsignals to electrical signals. The active pixel sensor array 1 may bedriven by a plurality of driving signals (e.g., pixel-selection, reset,and charge-transfer signals), which are transmitted from the row driver3. The converted electrical signals may be transmitted to the correlateddouble sampler 6.

The row driver 3 may be configured to generate driving signals fordriving the unit pixels, based on information decoded by the row decoder2, and then to transmit such driving signals to the active pixel sensorarray 1. When the unit pixels are arranged in a matrix form (i.e., inrows and columns), the driving signals may be provided to respectiverows.

The timing generator 5 may be configured to provide timing and controlsignals to the row decoder 2 and column decoder 4.

The correlated double sampler 6 may be configured to receive theelectric signals generated in the active pixel sensor array 1 and thento perform operations of holding and sampling the received electricsignals. For example, the correlated double sampler 6 may perform adouble sampling operation using a specific noise level and a signallevel of the electric signal and then output a difference levelcorresponding to a difference between the noise and signal levels.

The analog-to-digital converter 7 may be configured to convert an analogsignal, which includes information on the difference level outputtedfrom the correlated double sampler 6, to a digital signal.

The I/O buffer 8 may be configured to latch the digital signals and thento output the latched digital signals sequentially to an image signalprocessing part (not shown), based on information decoded by the columndecoder 4.

FIG. 2 is a circuit diagram of an active pixel sensor array of an imagesensor according to example embodiments of the inventive concept.

Referring to FIGS. 1 and 2, the active pixel sensor array 1 may includea plurality of unit pixels PX, which are arranged in a matrix shape.Each of the unit pixels PX may include a transfer transistor TX andlogic transistors RX, SX, and DX. The logic transistors may include areset transistor RX, a selection transistor SX, and a drive transistorDX. The transfer transistor TX may include a transfer gate TG. Each ofthe unit pixels PX may further include a photoelectric conversion devicePD and a floating diffusion region FD.

The photoelectric conversion device PD may be configured to generatephotocharges that are proportional to an amount of externally incidentlight and to store the photocharges. The photoelectric conversion devicePD may include a photo diode, a photo transistor, a photo gate, a pinnedphoto diode, or any combination thereof. The transfer transistor TX maybe configured to transfer electric charges, which are generated in thephotoelectric conversion device PD, to the floating diffusion region FD.The floating diffusion region FD may be configured to receive thecharges, which are generated in the photoelectric conversion device PD,and to cumulatively store them therein. The drive transistor DX may becontrolled by an amount of the photocharges to be stored in the floatingdiffusion region FD.

The reset transistor RX may be configured to periodically discharge thephotocharges stored in the floating diffusion region FD. The resettransistor RX may include a drain electrode connected to the floatingdiffusion region FD and a source electrode connected to a power voltageVDD. When the reset transistor RX is turned on, the power voltage VDDmay be applied to the floating diffusion region FD through the sourceelectrode of the reset transistor RX. Accordingly, the electric chargesstored in the floating diffusion region FD may be discharged through thereset transistor RX in the turned-on state, and as a result, thefloating diffusion region FD may be in a reset state.

The drive transistor DX may serve as a source follower buffer amplifier.The drive transistor DX may be configured to amplify a variation inelectric potential of the floating diffusion region FD and to output theamplified signal to an output line Vout.

The selection transistor SX may be used to select each row of the unitpixels PX for a read operation. When the selection transistor SX isturned on, the power voltage VDD may be applied to a drain electrode ofthe drive transistor DX.

FIG. 3 is a plan view illustrating an image sensor according to exampleembodiments of the inventive concept. FIGS. 4A, 4B, and 4C are sectionalviews taken along lines I-I′, II-II′, and III-III′, respectively, ofFIG. 3.

Referring to FIGS. 3 and 4A to 4C, an image sensor, according to exampleembodiments of the inventive concept, may include a photoelectricconversion layer 10, an interconnection layer 20, and anoptically-transparent layer 30. The photoelectric conversion layer 10may be interposed between the interconnection layer 20 and theoptically-transparent layer 30. The photoelectric conversion layer 10may include a semiconductor substrate 100 and photoelectric conversionregions 110, which are provided in the semiconductor substrate 100. Thephotoelectric conversion regions 110 may be configured to convert light,which is incident from the outside, to electrical signals.

The semiconductor substrate 100 may have a first or front surface 100 aand a second or rear surface 100 b, which are opposite to each other.The interconnection layer 20 may be disposed on the first surface 100 aof the semiconductor substrate 100, and the optically-transparent layer30 may be disposed on the second surface 100 b of the semiconductorsubstrate 100. It will be understood that, although the terms first,second, third, etc. may be used herein to describe various elements, andelements should not be limited by these terms; rather, these terms areonly used to distinguish one element from another element. Thus, a firstelement discussed below could be termed a second element withoutdeparting from the scope of the present inventive concepts.

The semiconductor substrate 100 may be a substrate, in which anepitaxial layer of a first conductivity type (e.g., p-type) is formed ona bulk silicon wafer of the first conductivity type. During a process offabricating an image sensor, the bulk silicon wafer may be removed, andin this case, the semiconductor substrate 100 may be formed of theepitaxial layer of the first conductivity type. As another example, thesemiconductor substrate 100 may be a bulk silicon wafer, in which a wellof the first conductivity type is formed. As still another example, thesemiconductor substrate 100 may include an epitaxial layer of a secondconductivity type (e.g., n-type), a bulk silicon wafer of the secondconductivity type, or a silicon-on-insulator (SOI) wafer.

The semiconductor substrate 100 may include an active region AR, whichis provided in a center region thereof, and a dummy region DR, which isprovided to enclose the active region AR. A plurality of the unit pixelsPX may be provided on the active region AR. A plurality of dummy pixelsDPX may be provided on at least a portion of the dummy region DR. Thedummy pixel DPX may have a similar structure to the unit pixel PX butmay not be used for an image sensing operation of the unit pixel PX(i.e., of converting optical signals to electrical signals).

The active region AR may include a plurality of the unit pixels PX. Afirst device isolation pattern 101 may be provided adjacent to thesecond surface 100 b of the semiconductor substrate 100 to define aplurality of the unit pixels PX. The first device isolation pattern 101may partially fill a trench TR, which extends from the second surface100 b of the semiconductor substrate 100 toward the first surface 100 a.The first device isolation pattern 101 may at least partially cover thesecond surface 100 b of the semiconductor substrate 100. In other words,the first device isolation pattern 101 may include a first portion inthe trench TR and a second portion covering the second surface 100 b ofthe semiconductor substrate 100. The first device isolation pattern 101may include an insulating material whose refractive index is lower thanthat of the semiconductor substrate 100 (e.g., made of silicon). Forexample, the first device isolation pattern 101 may include at least oneof a silicon oxide layer, a silicon oxynitride layer, or a siliconnitride layer.

A bottom TRb of the trench TR may be spaced apart from the first surface100 a of the semiconductor substrate 100. In other words, a depth of thetrench TR may be smaller than a thickness of the semiconductor substrate100. A width of the trench TR may gradually decrease in a direction fromthe second surface 100 b of the semiconductor substrate 100 toward thefirst surface 100 a.

The unit pixels PX may be two-dimensionally arranged in a firstdirection D1 and a second direction D2, which are not parallel to eachother. In other words, the unit pixels PX may be arranged in the firstand second directions D1 and D2 or in a matrix shape.

The photoelectric conversion region 110 may be provided in each of theunit pixels PX. The photoelectric conversion region 110 may be animpurity region having a second conductivity type (e.g., n-type) that isdifferent from the first conductivity type of the semiconductorsubstrate 100. As an example, the photoelectric conversion region 110may be adjacent to the second surface 100 b of the semiconductorsubstrate 100 and may be vertically spaced apart from the first surface100 a. The photoelectric conversion region 110 may have a difference inimpurity concentration between a first region adjacent to the firstsurface 100 a and a second region adjacent to the second surface 100 b.

The semiconductor substrate 100 and the photoelectric conversion region110 may constitute a photodiode. In each of the unit pixels PX, thesemiconductor substrate 100 of the first conductivity type and thephotoelectric conversion region 110 of the second conductivity type mayconstitute a p-n junction photodiode. The photoelectric conversionregion 110 constituting the photodiode may be configured to generate andaccumulate photocharges, and an amount of the photocharges may be inproportion to an intensity of an incident light.

A second device isolation pattern 103 may be provided adjacent to thefirst surface 100 a of the semiconductor substrate 100 to define aplurality of active patterns. Each of the unit pixels PX may include theactive patterns. Each of the active patterns may include, for example,the floating diffusion region FD and an impurity region IR.

A width of the second device isolation pattern 103 may graduallydecrease in a direction from the first surface 100 a of thesemiconductor substrate 100 toward the second surface 100 b. The seconddevice isolation pattern 103 may be vertically spaced apart from thefirst device isolation pattern 101. The second device isolation pattern103 may be formed of or include at least one of a silicon oxide layer, asilicon oxynitride layer, or a silicon nitride layer.

The transfer transistors TX and the logic transistors RX, SX, and DXpreviously described with reference to FIG. 2 may be provided on thefirst surface 100 a of the semiconductor substrate 100. The transfertransistor TX may be provided on each of the unit pixels PX. Thetransfer transistor TX may be electrically connected to thephotoelectric conversion region 110.

The transfer transistor TX may include the transfer gate TG and thefloating diffusion region FD. The transfer gate TG may include a lowerportion, which is inserted in the semiconductor substrate 100, and anupper portion, which is connected to the lower portion and has an upwardprotruding shape relative to the first surface 100 a of thesemiconductor substrate 100. A gate dielectric layer GI may beinterposed between the transfer gate TG and the semiconductor substrate100. The floating diffusion region FD may have a second conductivitytype (e.g., n-type) that is different from the first conductivity typeof the semiconductor substrate 100.

The logic transistors (e.g., RX, SX, and DX of FIG. 2) may be providedon each of the unit pixels PX. As an example, the logic transistors mayinclude the reset transistor RX.

The interconnection layer 20 may include first to third interlayeredinsulating layers 221, 222, and 223, which cover the transfertransistors TX and the logic transistors RX, SX, and DX, and first andsecond interconnection lines 212 and 213. The first and secondinterconnection lines 212 and 213 may be electrically connected to thetransfer transistors TX and the logic transistors RX, SX, and DX throughlower contact plugs BCP.

The interconnection layer 20 may be configured to perform a signalprocessing operation on electrical signals, which are converted by thephotoelectric conversion regions 110. The first and secondinterconnection lines 212 and 213 may be provided in the second andthird interlayered insulating layers 222 and 223, respectively, whichare stacked on the first surface 100 a of the semiconductor substrate100. In some embodiments, the first and second interconnection lines 212and 213 may be provided, regardless of the arrangement of thephotoelectric conversion regions 110. When viewed in a plan view, thefirst and second interconnection lines 212 and 213 may be provided tocross the photoelectric conversion regions 110.

The optically-transparent layer 30 may include a transparent conductivelayer TEL, a light-blocking layer GR, first to third color filters 303a, 303 b, and 303 c, and micro lenses 307. The optically-transparentlayer 30 may be configured to collect and filter externally incidentlight and then to provide the light to the photoelectric conversionlayer 10.

The transparent conductive layer TEL may be provided on the first deviceisolation pattern 101. The transparent conductive layer TEL may beelectrically disconnected from the semiconductor substrate 100 by thefirst device isolation pattern 101. The light-blocking layer GR may beprovided on the transparent conductive layer TEL. As an example, thetransparent conductive layer TEL may be formed of or include at leastone of indium tin oxide (ITO), indium zinc oxide (IZO), zinc oxide(ZnO), or organic transparent conductive materials. As an example, thelight-blocking layer GR may be formed of or include at least one ofmetallic materials, such as tungsten (W), copper (Cu), hafnium (Hf),zirconium (Zr), titanium (Ti), tantalum (Ta), aluminum (Al), ruthenium(Ru), palladium (Pd), platinum (Pt), cobalt (Co), or nickel (Ni).

The light-blocking layer GR may have a grid structure. In detail, thelight-blocking layer GR may include first extended portions GRaextending in the first direction D1 and second extended portions GRbextending in the second direction D2. Light transmission regions LPR maybe defined by the first extended portions GRa and the second extendedportions GRb crossing each other. The light transmission regions LPR maybe two-dimensionally arranged in the first and second directions D1 andD2. The light transmission regions LPR may be vertically overlapped withthe unit pixels PX and the dummy pixels DPX. Light may be incident intothe unit pixels PX through the light transmission regions LPR.

The light-blocking layer GR may further include a light-blocking portionGRc on the dummy region DR. The light-blocking portion GRc may beadjacent to the dummy pixels DPX. The light-blocking portion GRc mayprevent light from being incident into the semiconductor substrate 100.

The light-blocking layer GR may be electrically connected to a pad PADon a peripheral region of the semiconductor substrate 100 (e.g., outsidethe dummy region DR). As an example, the light-blocking layer GR and thepad PAD may be electrically connected to each other through a conductiveline extended from the pad PAD and an upper contact plug TCP between theconductive line and the light-blocking layer GR.

A negative voltage may be applied to the pad PAD. As an example, the padPAD may be connected to a charge pump and may be applied with a negativevoltage that is provided from the charge pump. In some embodiments, aconstant negative voltage may be applied to the pad PAD.

The transparent conductive layer TEL may include a horizontal portion HPand a vertical portion VP. The horizontal portion HP may be provided tofully cover the second surface 100 b of the semiconductor substrate 100,in some embodiments. The horizontal portion HP may be substantiallyparallel to the second surface 100 b of the semiconductor substrate 100.The horizontal portion HP may be interposed between the light-blockinglayer GR and the first device isolation pattern 101. The horizontalportion HP may be interposed between the first to third color filters303 a, 303 b, and 303 c and the first device isolation pattern 101. Thehorizontal portion HP may be vertically overlapped with the unit pixelsPX and the dummy pixels DPX.

The vertical portion VP may be vertically extended from the secondsurface 100 b of the semiconductor substrate 100 toward the firstsurface 100 a. When viewed in a plan view, the vertical portion VP maybe overlapped with the first extended portions GRa and the secondextended portions GRb of the light-blocking layer GR. In other words,the vertical portion VP may have a grid structure. The vertical portionVP may at least partially fill the trench TR provided with the firstdevice isolation pattern 101. The vertical portion VP may be interposedbetween each adjacent pair of the unit pixels PX. When viewed in a planview, the vertical portion VP may be provided to surround each of theunit pixels PX. A width of the vertical portion VP may graduallydecrease in a direction from the second surface 100 b of thesemiconductor substrate 100 toward the first surface 100 a. As anexample, a width W1 of the vertical portion VP adjacent to the secondsurface 100 b may be larger than a width W2 of the vertical portion VPadjacent to the first surface 100 a.

The light-blocking layer GR and the transparent conductive layer TEL maybe in direct contact with each other and may be electrically connectedto each other. The negative voltage may be applied to the transparentconductive layer TEL through the pad PAD and the light-blocking layerGR. Positive charges, which are produced in the unit pixels PX, may bedischarged through the transparent conductive layer TEL surrounding theunit pixels PX. Thus, it may be possible to improve a dark currentproperty of an image sensor.

The first to third color filters 303 a, 303 b, and 303 c may be providedon the transparent conductive layer TEL and the light-blocking layer GR.The first to third color filters 303 a, 303 b, and 303 c may be providedon the unit pixels PX, respectively. The micro lenses 307 may beprovided on the first to third color filters 303 a, 303 b, and 303 c,respectively. A planarization layer 305 may be interposed between thefirst to third color filters 303 a, 303 b, and 303 c and the microlenses 307.

The first to third color filters 303 a, 303 b, and 303 c may be primarycolor filters. As an example, the first color filter 303 a may be agreen color filter, the second color filter 303 b may be a blue colorfilter, and the third color filter 303 c may be a red color filter. Insome embodiments, the first to third color filters 303 a, 303 b, and 303c may be arranged in a Bayer pattern.

FIGS. 5 to 7 are sectional views, which are taken along line I-I′ ofFIG. 3 and illustrate a method of fabricating an image sensor accordingto example embodiments of the inventive concept.

Referring to FIGS. 3 and 5, the semiconductor substrate 100 having thefirst and second surfaces 100 a and 100 b opposite to each other may beprovided. The semiconductor substrate 100 may include the active regionAR and the dummy region DR. The semiconductor substrate 100 may be dopedto have a first conductivity type (e.g., p-type).

The second device isolation pattern 103 may be formed on the firstsurface 100 a of the semiconductor substrate 100. The formation of thesecond device isolation pattern 103 may include forming shallow trenchesin the first surface 100 a of the semiconductor substrate 100 and atleast partially filling the shallow trenches with an insulating layer.The insulating layer may be formed of or include at least one of siliconoxide, silicon nitride, or silicon oxynitride.

The second device isolation pattern 103 may be formed to define activepatterns. The floating diffusion region FD and the impurity region IRmay be formed by doping each of the active patterns with impurities. Thetransfer transistors TX and the logic transistors RX, SX, and DXpreviously described with reference to FIG. 2 may be formed on theactive patterns.

The first interlayered insulating layer 221 may be formed on the firstsurface 100 a of the semiconductor substrate 100. The first interlayeredinsulating layer 221 may be formed to cover the transfer transistors TXand the logic transistors RX, SX, and DX, which are formed on the firstsurface 100 a of the semiconductor substrate 100.

The second and third interlayered insulating layers 222 and 223 may beformed on the first interlayered insulating layer 221. The first andsecond interconnection lines 212 and 213 may be formed in the second andthird interlayered insulating layers 222 and 223, respectively. Thelower contact plugs BCP may be formed to electrically connect the firstand second interconnection lines 212 and 213 to the transfer transistorsTX and the logic transistors RX, SX, and DX.

Referring to FIGS. 3 and 6, an etching process may be performed on thesecond surface 100 b of the semiconductor substrate 100 to form thetrench TR. The trench TR may be formed to have a depth that is less thana thickness of the semiconductor substrate 100. The trench TR may beformed to have a gradually decreasing width in a direction from thesecond surface 100 b of the semiconductor substrate 100 toward the firstsurface 100 a. When viewed in a plan view, the trench TR may be formedto have a grid structure. A plurality of the unit pixels PX may bedefined in the active region AR by the trench TR. The unit pixels PX maybe two-dimensionally arranged in two different directions (e.g., thefirst and second directions D1 and D2).

Referring to FIGS. 3 and 7, the first device isolation pattern 101 andthe transparent conductive layer TEL may be sequentially formed to atleast partially fill the trench TR. The first device isolation pattern101 may be conformally formed to partially fill the trench TR. The firstdevice isolation pattern 101 may cover the second surface 100 b of thesemiconductor substrate 100. In some embodiments, the first deviceisolation pattern 101 may include at least one of a silicon oxide layer,a silicon oxynitride layer, or a silicon nitride layer.

The transparent conductive layer TEL may be formed to completely fillthe trench TR provided with the first device isolation pattern 101. Thetransparent conductive layer TEL may include the horizontal portion HP,which is provided on the second surface 100 b of the semiconductorsubstrate 100, and the vertical portion VP, which is provided to atleast partially fill the trench TR. As an example, the transparentconductive layer TEL may be formed of or include at least one of indiumtin oxide (ITO), indium zinc oxide (IZO), zinc oxide (ZnO), or organictransparent conductive materials.

The photoelectric conversion regions 110 may be formed in the unitpixels PX by doping the active region AR with impurities. Thephotoelectric conversion regions 110 may have a second conductivity type(e.g., n-type), which is different from the first conductivity type(e.g., p-type).

Referring back to FIGS. 3 and 4A to 4C, a planarization process may beperformed on the second surface 100 b of the semiconductor substrate 100to allow the transparent conductive layer TEL to have a flat topsurface. The light-blocking layer GR may be formed on the transparentconductive layer TEL. The light-blocking layer GR may be formed to havea grid structure. The first to third color filters 303 a, 303 b, and 303c may be formed on the light-blocking layer GR. The first to third colorfilters 303 a, 303 b, and 303 c may be formed on the unit pixels PX,respectively. The micro lenses 307 may be formed on the first to thirdcolor filters 303 a, 303 b, and 303 c.

FIGS. 8A, 8B and FIG. 8C are sectional views, which are taken alonglines I-I′, II-II′, and III-III′, respectively, of FIG. 3 and illustratean image sensor according to example embodiments of the inventiveconcept. In the following description, an element previously describedwith reference to FIGS. 3 and 4A to 4C may be identified by the samereference number without repeating an overlapping description thereof.

Referring to FIGS. 3 and 8A to 8C, the first device isolation pattern101 may be provided to fully fill the trench TR. In other words, thevertical portion VP of the transparent conductive layer TEL describedwith reference to FIGS. 4A to 4C may be omitted. The transparentconductive layer TEL may cover a top surface of the first deviceisolation pattern 101. The transparent conductive layer TEL may beparallel to the second surface 100 b of the semiconductor substrate 100.

FIG. 9 is a plan view illustrating an image sensor according to exampleembodiments of the inventive concept. FIGS. 10A, 10B, and 10C aresectional views taken along lines I-I′, II-II′, and III-III′,respectively, of FIG. 9. In the following description, an elementpreviously described with reference to FIGS. 3 and 4A to 4C may beidentified by the same reference number without repeating an overlappingdescription thereof.

Referring to FIGS. 9 and 10A to 10C, the first device isolation pattern101 and a conductive pattern 105 may be provided in the trench TRpenetrating the semiconductor substrate 100. A depth of the trench TRmay be substantially equal to a thickness of the semiconductor substrate100. The trench TR may have a gradually increasing width in a directionfrom the second surface 100 b of the semiconductor substrate 100 towardthe first surface 100 a.

The first device isolation pattern 101 may be provided to conformallyand partially fill the trench TR. The conductive pattern 105 may fillthe entire portion of the trench TR, except the first device isolationpattern 101. A top surface of the conductive pattern 105 and a topsurface of the first device isolation pattern 101 may be coplanar withthe second surface 100 b of the semiconductor substrate 100. A bottomsurface of the conductive pattern 105 and a bottom surface of the firstdevice isolation pattern 101 may be coplanar with the first surface 100a of the semiconductor substrate 100.

When viewed in a plan view, the conductive pattern 105 may be providedto have a grid structure. The conductive pattern 105 may be overlappedwith the first and second extended portions GRa and GRb of thelight-blocking layer GR. The conductive pattern 105 may be interposedbetween an adjacent pair of the unit pixels PX. The conductive pattern105 may have a gradually increasing width in a direction from the secondsurface 100 b of the semiconductor substrate 100 toward the firstsurface 100 a. The conductive pattern 105 may be formed of or include atleast one of conductive materials. As an example, the conductive pattern105 may include n- or p-type poly silicon.

A first planarization layer 301 may be provided on the second surface100 b of the semiconductor substrate 100. The first planarization layer301 may include a silicon oxide layer. The transparent conductive layerTEL may be provided on the first planarization layer 301. The verticalportion VP of the transparent conductive layer TEL described withreference to FIGS. 4A to 4C may be omitted.

Referring back to FIGS. 9 and 10C, the transparent conductive layer TELmay include contact portions CNT on the dummy region DR. When viewed ina plan view, the contact portion CNT may be provided between an adjacentpair of the dummy pixels DPX. The contact portions CNT may be providedto penetrate the first planarization layer 301 and to be in contact withthe conductive pattern 105. The transparent conductive layer TEL may beelectrically connected to the conductive pattern 105 through the contactportions CNT. On the active region AR, the transparent conductive layerTEL may be spaced apart from the conductive pattern 105 with the firstplanarization layer 301 interposed therebetween. In other words, thecontact portions CNT may not be provided on the active region AR.

FIGS. 11, 12, 13, and 14A are sectional views, which are taken alongline I-I′ of FIG. 9 and illustrate a method of fabricating an imagesensor according to example embodiments of the inventive concept. FIG.14B is a sectional view taken along line III-IIII′ of FIG. 9.

Referring to FIGS. 9 and 11, the semiconductor substrate 100 having thefirst and second surfaces 100 a and 100 b opposite to each other may beprovided. The second device isolation pattern 103 may be formed on thefirst surface 100 a of the semiconductor substrate 100. The seconddevice isolation pattern 103 may be formed to define active patterns.

Referring to FIGS. 9 and 12, an etching process may be performed on thefirst surface 100 a of the semiconductor substrate 100 to form thetrench TR. The trench TR may be formed to have a gradually decreasingwidth in a direction from the first surface 100 a of the semiconductorsubstrate 100 toward the second surface 100 b. When viewed in a planview, the trench TR may be formed to have a grid structure. A pluralityof the unit pixels PX may be defined in the active region AR by thetrench TR.

The first device isolation pattern 101 and the conductive pattern 105may be formed to at least partially fill the trench TR. The formation ofthe first device isolation pattern 101 and the conductive pattern 105may include conformally forming a device isolation layer to partiallyfill the trench TR, forming a conductive layer on the device isolationlayer to at least partially fill the trench TR, and planarizing thedevice isolation layer and the conductive layer to expose the firstsurface 100 a of the semiconductor substrate 100. As an example, thefirst device isolation pattern 101 may be formed of or include at leastone of silicon oxide, silicon oxynitride, or silicon nitride. Theconductive pattern 105 may be formed of or include an n- or p-type polysilicon layer.

Referring to FIGS. 9 and 13, the floating diffusion region FD and theimpurity region IR may be formed by doping each of the active patternswith impurities. The transfer transistors TX and the logic transistorsRX, SX, and DX previously described with reference to FIG. 2 may beformed on the active patterns.

The first to third interlayered insulating layers 221, 222, and 223 maybe formed on the first surface 100 a of the semiconductor substrate 100.The first and second interconnection lines 212 and 213 may be formed inthe second and third interlayered insulating layers 222 and 223,respectively. The lower contact plugs BCP may be formed.

Referring to FIGS. 9, 14A, and 14B, a planarization process may beperformed on the second surface 100 b of the semiconductor substrate 100to expose the conductive pattern 105. The first planarization layer 301may be formed on the second surface 100 b of the semiconductor substrate100. The first planarization layer 301 may be formed to cover theexposed top surface of the conductive pattern 105.

The conductive pattern 105 on the dummy region DR may be patterned toform holes HO exposing the top surface of the conductive pattern 105.When viewed in a plan view, the hole HO may be formed between anadjacent pair of the dummy pixels DPX.

Referring back to FIGS. 9 and 10A to 10C, the transparent conductivelayer TEL may be formed on the first planarization layer 301. Thetransparent conductive layer TEL may include the contact portions CNTfilling the holes HO. The light-blocking layer GR may be formed on thetransparent conductive layer TEL. The light-blocking layer GR may beformed to have a grid structure. The first to third color filters 303 a,303 b, and 303 c may be formed on the light-blocking layer GR. The firstto third color filters 303 a, 303 b, and 303 c may be formed on the unitpixels PX, respectively. The micro lenses 307 may be formed on the firstto third color filters 303 a, 303 b, and 303 c.

FIGS. 15A and 15B are sectional views, which are taken along lines I-I′and III-III′, respectively, of FIG. 9 and illustrate an image sensoraccording to example embodiments of the inventive concept. In thefollowing description, an element previously described with reference toFIGS. 9 and 10A to 10C may be identified by the same reference numberwithout repeating an overlapping description thereof.

Referring to FIGS. 9, 15A, and 15B, the conductive pattern 105 may beformed of or include a transparent conductive material. For example, theconductive pattern 105 may be formed of or include at least one ofindium tin oxide (ITO), indium zinc oxide (IZO), zinc oxide (ZnO), ororganic transparent conductive materials. In some embodiments, theconductive pattern 105 may include the same material as the transparentconductive layer TEL.

In an image sensor according to some embodiments of the inventiveconcept, a negative voltage is applied to a transparent conductive layerprovided on unit pixels, and in this case, positive charges generated inthe unit pixels can be effectively removed through the transparentconductive layer. This may make it possible to improve a dark currentproperty of an image sensor.

While example embodiments of the inventive concepts have beenparticularly shown and described, it will be understood by one ofordinary skill in the art that variations in form and detail may be madetherein without departing from the spirit and scope of the attachedclaims.

What is claimed is:
 1. An image sensor, comprising: a substratecomprising an active region and a dummy region, the substrate having afirst surface and a second surface opposite to the first surface; afirst device isolation pattern in a trench that extends from the firstsurface to the second surface and penetrates the substrate, the firstdevice isolation pattern defining a plurality of unit pixels in theactive region; a conductive pattern in the trench, wherein the firstdevice isolation pattern is between the conductive pattern and thesubstrate, and wherein the conductive pattern has an increasing width ina direction from the second surface of the substrate toward the firstsurface of the substrate; a plurality of transistors on the firstsurface of the substrate; a transparent conductive layer on the secondsurface of the substrate; a light-blocking layer on the transparentconductive layer and electrically connected to the transparentconductive layer, the light-blocking layer having a grid structure thatis adjacent light transmission regions; and a pad electrically on thedummy region and connected to the light-blocking layer, wherein thetransparent conductive layer comprises a contact portion on the dummyregion, and wherein the contact portion is connected to the conductivepattern.
 2. The image sensor of claim 1, further comprising: aplanarization layer on the second surface of the substrate, wherein theplanarization layer is between the transparent conductive layer and theconductive pattern, and wherein the contact portion penetrates theplanarization layer on the dummy region and is in contact with theconductive pattern.
 3. The image sensor of claim 1, wherein theconductive pattern is vertically overlapped with the grid structure ofthe light-blocking layer.
 4. The image sensor of claim 1, furthercomprising: color filters on the light-blocking layer; and micro lenseson respective ones of the color filters.
 5. The image sensor of claim 1,wherein the transparent conductive layer comprises at least one ofindium tin oxide (ITO), indium zinc oxide (IZO), zinc oxide (ZnO), ororganic transparent conductive materials.
 6. The image sensor of claim1, wherein the transparent conductive layer is a two-dimensional layerextending from the active region to the dummy region.
 7. The imagesensor of claim 1, wherein the transparent conductive layer issubstantially parallel to the second surface, and wherein a sidewall ofthe conductive pattern in the trench is slanted with respect to thetransparent conductive layer.
 8. The image sensor of claim 1, whereineach of the plurality of unit pixels includes a photoelectric conversionregion.
 9. The image sensor of claim 1, further comprising:interconnection lines in an interlayered insulating layer on the firstsurface, wherein the interconnection lines are electrically connected tothe plurality of transistors.
 10. The image sensor of claim 1, whereinthe plurality of transistors comprise a plurality of transfer gates onthe plurality of unit pixels, respectively, and wherein each of theplurality of transfer gates includes a lower portion inserted in thesubstrate, and an upper portion on the first surface of the substrateand connected to the lower portion.
 11. An image sensor, comprising: asubstrate comprising a first surface and a second surface opposite tothe first surface; a first device isolation pattern in a trench thatextends from the first surface to the second surface and penetrates thesubstrate, the first device isolation pattern defining a plurality ofunit pixels in the substrate; a conductive pattern in the trench,wherein the first device isolation pattern is between the conductivepattern and the substrate; a plurality of transistors on the firstsurface of the substrate; a transparent conductive layer on the secondsurface of the substrate; and a light-blocking layer on the transparentconductive layer and electrically connected to the transparentconductive layer, wherein the conductive pattern has a top surface thatis coplanar with the second surface of the substrate, wherein thetransparent conductive layer is a two-dimensional layer overlapping theplurality of unit pixels, and wherein the transparent conductive layercomprises a contact portion connected to the top surface of theconductive pattern.
 12. The image sensor of claim 11, wherein theconductive pattern comprises doped polysilicon, and wherein the contactportion comprises a same conductive material as the transparentconductive layer.
 13. The image sensor of claim 12, wherein thetransparent conductive layer comprises at least one of indium tin oxide(ITO), indium zinc oxide (IZO), zinc oxide (ZnO), or organic transparentconductive materials.
 14. The image sensor of claim 11, wherein thelight-blocking layer has a grid structure that is adjacent lighttransmission regions, and wherein the conductive pattern is verticallyoverlapped with the grid structure of the light-blocking layer.
 15. Theimage sensor of claim 11, wherein a negative voltage is applied from thetransparent conductive layer to the conductive pattern through thelight-blocking layer.
 16. The image sensor of claim 11, furthercomprising: a planarization layer on the second surface of thesubstrate, wherein the planarization layer is between the transparentconductive layer and the conductive pattern, wherein the contact portionincludes a same transparent conductive material as the transparentconductive layer, and wherein the contact portion penetrates theplanarization layer and is in contact with the conductive pattern. 17.An image sensor, comprising: a substrate comprising a first surface anda second surface opposite to the first surface; a conductive pattern ina trench that penetrates the substrate and defines a plurality of unitpixels in the substrate; a plurality of transistors on the first surfaceof the substrate; a planarization layer on the second surface of thesubstrate, the planarization layer on a top surface of the conductivepattern; a transparent conductive layer on the planarization layer; anda light-blocking layer on the transparent conductive layer andelectrically connected to the transparent conductive layer, wherein thetransparent conductive layer comprises a contact portion that penetratesthe planarization layer and is in contact with the top surface of theconductive pattern, wherein the contact portion comprises a sameconductive material as the transparent conductive layer, and wherein theconductive pattern comprises a conductive material different from thetransparent conductive layer, wherein the transparent conductive layeris substantially parallel to the second surface, and wherein a sidewallof the conductive pattern in the trench is slanted with respect to thetransparent conductive layer.
 18. The image sensor of claim 17, whereinthe conductive pattern comprises doped polysilicon, and wherein thetransparent conductive layer comprises at least one of indium tin oxide(ITO), indium zinc oxide (IZO), zinc oxide (ZnO), or organic transparentconductive materials.
 19. The image sensor of claim 17, wherein the topsurface of the conductive pattern is coplanar with the second surface ofthe substrate, and wherein a bottom surface of the conductive pattern iscoplanar with the first surface of the substrate.
 20. The image sensorof claim 17, further comprising a pad on a peripheral region of thesubstrate and electrically connected to the light-blocking layer.